The tribological performance of CNx coatings depends strongly on both the e
nvironmental conditions and the nature of the coating? in relation to the d
eposition process. In this paper, we present and discuss friction results i
n relation to the nature, crystal structure, chemical composition and hybri
dization state of CNx coatings prepared by dual ion beam sputtering under v
arious conditions. The films were characterized by infrared spectroscopy, X
-ray photoelectron spectroscopy and electron energy loss spectroscopy. By i
ncreasing the polarization of the substrate, an increase of the N/C atomic
ratio, together with a decrease of the C=N/C-N and C=N/C=C bonding ratios a
re observed. The concentration of C equivalent to N triple bond is negligib
le. Reciprocating pin-on-plane friction tests have been carried out in humi
d ambient air and in ultrahigh vacuum. Steady-stare friction in ambient air
has been found to be in the range of 0.14-0.25, increasing slightly with t
he increase of the substrate polarization during deposition. The presence o
f C=N double bond is associated with a lower friction coefficient. The stea
dy-state friction of the film exhibiting the lowest friction in ambient air
is near 0.6 in ultrahigh vacuum. The chemical composition of the topmost s
urfaces both inside and outside the UHV wear tracks of the plane and the pi
n was investigated by in situ XPS and AES performed at the completion of th
e friction test in the analytical tribometer. The high friction in UHV is a
ssociated with a significant transfer of the iron oxide top layers from the
pin as wear particles inside the wear track of the plane, without any CN t
ransfer onto the steel pin. (C) 1999 Elsevier Science S.A. All rights reser
ved.