Plowing on the sub-50 nm scale: Nanolithography using scanning force microscopy

Authors
Citation
U. Kunze et B. Klehn, Plowing on the sub-50 nm scale: Nanolithography using scanning force microscopy, ADVAN MATER, 11(17), 1999, pp. 1473-1475
Citations number
16
Categorie Soggetti
Multidisciplinary,"Material Science & Engineering
Journal title
ADVANCED MATERIALS
ISSN journal
09359648 → ACNP
Volume
11
Issue
17
Year of publication
1999
Pages
1473 - 1475
Database
ISI
SICI code
0935-9648(199912)11:17<1473:POTSNS>2.0.ZU;2-1