Impedance spectroscopy and cyclic voltammetry measurements were used to exa
mine solid-slate properties of thin anodic films on tin. The impedance of t
in \ n-type SnO2 \ electrolyte system was studied as a function of applied
potential and frequency. In the absence of illumination at room temperature
. the impedance spectroscopy technique when used in conjunction with an app
lied bias potential can be a powerful tool for identification of deep-level
states. An electrical equivalent circuit corresponding to the Voight model
, which describes the behavior of the passive film on tin more adequately t
han the models for 'classical' semiconductors, is presented. The change in
the Mott-Schottky plot was interpreted in terms of partial ionization of de
ep-level states. The resistive component of the impedance measured at low f
requencies was much more sensitive to deep-level states than the capacitive
one and was used to determine their distribution in the bulk of SnO2. Both
flat-band potential and donor concentration were estimated from the space
charge capacitance at high frequencies. The dielectric properties of the ox
ide film were discussed and several parameters were determined in terms of
a parallel plate capacitor and in accordance with the high-field growth law
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