This paper presents a vector network analyzer system for the 70-230-GHz ban
dwidth. The instrument employs active probes for millimeter-wave signal gen
eration and detection, and for signal delivery to the device-under-test. Mi
limeter-wave signals are generated and detected within the active probes us
ing an integrated circuit (IC) based on nonlinear transmission lines. The I
C contains all elements of an S-parameter test set: a multiplier to generat
e the radio-frequency signal, directional couplers to separate the incident
and reflected waves, and a pair of high-speed sampling circuits to convert
the signals down to lower frequencies. Two-port measurements over the 70-2
30-GHz bandwidth are demonstrated, including those of directional couplers
and millimeter-wave high electron-mobility transistors.