MICROFABRICATION OF AN ELECTROLUMINESCENT POLYMER LIGHT-EMITTING DIODE PIXEL ARRAY

We describe a method to microfabricate a light emitting diode (LED) pi xel array based on conjugated electroluminescent polymers sandwiched b etween ITO and aluminum. The method, based on direct photoablation usi ng a 193 nm excimer laser, maintains intact the properties of the poly mers. The technique as described here has already achieved array of 20 mu m x 20 mu m pixels with enhanced electroluminescence (EL) from pix els. The method can be extended to achieve nanometer sizes using nearf ield nanolithography. The microfabrication of the LED array requires a lso the patterning of the ITO and the aluminum electrode. For better p erformance of the device it is important to map the conductivity of th e patterned electrodes. For that purpose we have used a novel mm-wave conductivity microscope which is capable to measure the local conducti vity of the patterned film with a spatial resolution of similar to 10- 30 mu m.