Influence of surface topography on depth profiles obtained by Rutherford backscattering spectrometry

A method for determining correct depth profiles from samples with rough sur faces is presented. The method combines Rutherford backscattering spectrome try with atomic force microscopy. The topographical information obtained by atomic force microscopy is used to calculate the effect of the surface rou ghness on the backscattering spectrum. As an example, annealed Au/ZnSe hete rostructures are studied. Gold grains were observed on the surfaces of the annealed samples. The annealing also caused diffusion of gold into the ZnSe . Backscattering spectra of the samples were measured with a 2 MeV He-4(+) ion beam. A scanning nuclear microprobe was used to verify the results by m easuring backscattering from grains and from areas of the samples where no grains had been formed during annealing. (C) 2000 American Institute of Phy sics. [S0021-8979(00)07501-0].