Structural properties of fluorinated amorphous carbon films

Fluorinated amorphous carbon films have been deposited in a plasma-enhanced chemical vapor deposition system, and the optical properties examined by F ourier transform infrared and ultraviolet-visible absorption spectroscopy. The infrared absorption spectra in the region from 1000 to 1800 cm(-1) were resolved into ten peaks, which were assigned to various carbon-fluorine an d carbon-carbon vibration modes. A relationship between the optical band ga p and the aromatic carbon (sp(2)) concentration is demonstrated. (C) 2000 A merican Institute of Physics. [S0021-8979(00)00101-8].