Surface tension powered self-assembly of 3-D micro-optomechanical structures

Authors
Citation
Rra. Syms, Surface tension powered self-assembly of 3-D micro-optomechanical structures, J MICROEL S, 8(4), 1999, pp. 448-455
Citations number
38
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
ISSN journal
10577157 → ACNP
Volume
8
Issue
4
Year of publication
1999
Pages
448 - 455
Database
ISI
SICI code
1057-7157(199912)8:4<448:STPSO3>2.0.ZU;2-U
Abstract
A new surface micromachining process for surface tension powered self-assem bly of silicon-based microstructures is described. Mechanical parts are for med from bonded silicon-on-insulator material and rotated out-of-plane by m elting photoresist pads at low temperature. Simple mechanisms that allow ac curate control of the final angle are introduced and used to construct fixe d 45 degrees mirrors and scanning mirror assemblies. [435].