A new surface micromachining process for surface tension powered self-assem
bly of silicon-based microstructures is described. Mechanical parts are for
med from bonded silicon-on-insulator material and rotated out-of-plane by m
elting photoresist pads at low temperature. Simple mechanisms that allow ac
curate control of the final angle are introduced and used to construct fixe
d 45 degrees mirrors and scanning mirror assemblies. [435].