Electron interactions with plasma processing gases: An update for CF4, CHF3, C2F6, and C3F8

Authors
Christophorou, LG Olthoff, JK
Citation
Lg. Christophorou et Jk. Olthoff, Electron interactions with plasma processing gases: An update for CF4, CHF3, C2F6, and C3F8, J PHYS CH R, 28(4), 1999, pp. 967-982
Citations number
75
Categorie Soggetti
Multidisciplinary
Journal title
JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA
ISSN journal
00472689 → ACNP
Volume
28
Issue
4
Year of publication
1999
Pages
967 - 982
Database
ISI
SICI code
0047-2689(199907/08)28:4<967:EIWPPG>2.0.ZU;2-M
Abstract
An update of electron-collision cross sections and electron transport param eters is presented for CF4, CHF3, C2F6, and C3F8. (C) 1999 American Institu te of Physics and American Chemical Society. [S0047-2689(99)00104-X].