Thermal characterisation of porous silicon membranes

Results of thermal characterisation based on the phase lag of photoacoustic signal for front-rear surface illumination of porous silicon and nitrided porous silicon membranes for gas sensing devices are presented. Thermal con ductivity values in good agreement with literature values have been obtaine d, confirming the usefulness and reliability of photothermal methods in the investigation of new materials for sensors and microsystems. Preliminary r esults of stokes-antistokes Raman investigations are also reported.