Optical waveguides fabricated from oxidised porous silicon

Authors
Charrier, J Le Gorju, E Haji, L Guendouz, M
Citation
J. Charrier et al., Optical waveguides fabricated from oxidised porous silicon, J POROUS MA, 7(1-3), 2000, pp. 243-246
Citations number
13
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JOURNAL OF POROUS MATERIALS
ISSN journal
13802224 → ACNP
Volume
7
Issue
1-3
Year of publication
2000
Pages
243 - 246
Database
ISI
SICI code
1380-2224(200001)7:1-3<243:OWFFOP>2.0.ZU;2-0
Abstract
Further results on the optical properties of oxidised porous silicon as a f unction of porosity and oxidation conditions are presented in this paper. T he refractive index varies logarithmically with the oxidation time irrespec tive of the porosity of the sample and the oxidation temperature. Burried w aveguides have been realised from as-prepared and oxidised porous silicon. Optical losses of 18 dB cm(-1) at lambda = 1.3 mu m have been obtained afte r oxidation at 800 degrees C for 35 min.