Cathodoluminescence from implanted and anodized polycrystalline silicon films

Luminescence emission of LPCVD polycrystalline silicon films has been studi ed by cathodoluminescence (CL) in the scanning electron microscope. As-depo sited films show visible luminescence with dominant blue band. The relative intensity of blue emission is enhanced by implantation and by slight anodi zation treatments. Our investigations are consistent with previous PL resul ts and indicate that the origin of blue emission is related to quantum conf inement effects. On the other hand, the effect of annealing in these sample s is a reduction of the CL signal that could be related to the increase of the nanocrystals size.