Point defects are created in bulk ZnO and epitaxial GaN by 1-2 MeV electron
irradiation at 300 K, and are studied by temperature-dependent Hall effect
, photoluminescence, and deep level transient spectroscopy measurements. Th
e N vacancy is identified as a fairly shallow donor in GaN, whereas defect
identifications in ZnO are uncertain at this time. Both materials, but espe
cially ZnO, are quite resistant to displacement damage. (C) 1999 Elsevier S
cience S.A. All rights reserved.