Optimisation of experimental conditions for variable angle spectroscopic ellipsometry analysis. Application to GaAs/(Al,Ga)As quantum well characterisation

Authors
Colard, S Mihailovic, M
Citation
S. Colard et M. Mihailovic, Optimisation of experimental conditions for variable angle spectroscopic ellipsometry analysis. Application to GaAs/(Al,Ga)As quantum well characterisation, MAT SCI E B, 66(1-3), 1999, pp. 88-91
Citations number
8
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
ISSN journal
09215107 → ACNP
Volume
66
Issue
1-3
Year of publication
1999
Pages
88 - 91
Database
ISI
SICI code
0921-5107(199912)66:1-3<88:OOECFV>2.0.ZU;2-E
Abstract
For variable angle spectroscopic ellipsometry (VASE), a systematic research of the best set of angles of incidence taking into account sensitivities o f the spectra to the thickness and dielectric function as well as correlati on can significantly improve the accuracy of studies. A procedure minimisin g the expected uncertainties of the parameters is developed. A GaAs/(AI,Ga) As quantum well structure has been investigated using the above experimenta l procedure. Deduced composition and thickness from VASE and photoluminesce nce experiments are in good agreement with reflectivity results. (C) 1999 E lsevier Science S.A. All rights reserved.