Assessment of carbon concentrations in polycrystalline and monocrystallinegallium arsenide using SSMS, FTIR, and CPAA

Authors
Wiedemann, B Alt, HC Bethge, K Meyer, JD Michelmann, RW
Citation
B. Wiedemann et al., Assessment of carbon concentrations in polycrystalline and monocrystallinegallium arsenide using SSMS, FTIR, and CPAA, MAT SCI E B, 66(1-3), 1999, pp. 118-122
Citations number
19
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
ISSN journal
09215107 → ACNP
Volume
66
Issue
1-3
Year of publication
1999
Pages
118 - 122
Database
ISI
SICI code
0921-5107(199912)66:1-3<118:AOCCIP>2.0.ZU;2-C
Abstract
For the assessment of C concentration [C] in GaAs with SSMS, FTIR, and CPAA new results are presented. Using a SSMS relative sensitivity coefficient R SC = [C](SSMS)/[C](CPAA) = 3.1 +/- 0.1 an improved FTIR calibration factor f = [C]/(integrated absorption) = (7.1 +/- 0.2) x 10(15) cm(-1) for the inf rared absorption due to the local vibrational mode of C on As sites in the GaAs lattice (582 cm(-1)) at 77 K has been derived. (C) 1999 Elsevier Scien ce S.A. All rights reserved.