New methods for the characterization of surface states density and substrate/epilayer interface states in pseudomorphic AlGaAs/InGaAs/GaAs heterostructures
V. Mosser et al., New methods for the characterization of surface states density and substrate/epilayer interface states in pseudomorphic AlGaAs/InGaAs/GaAs heterostructures, MAT SCI E B, 66(1-3), 1999, pp. 157-161
Two new methods are presented for the characterization of the upper (dielec
trics/semiconductor) and lower (epilayer/substrate) boundary conditions for
devices using planar conduction in epilayers grown on SI-GaAs substrates.
They make use of the same pseudomorphic AlGaAs/InGaAs/GaAs Hall heterostruc
tures as test devices. They are used to investigate the electronic behavior
of standard cleaned and ozone cleaned epilayer/substrate interfaces, and t
he density of states of surface states as well as their dynamic behavior. (
C) 1999 Elsevier Science S.A. All rights reserved.