Atomic force microscopy (AFM) has been used to study the pore wall structur
e of p-type macroporous silicon. Nanometer size particles are found to dist
ribute on the pore wall of the luminescence macroporous silicon samples. Co
mbided with the analysis of photoluminescence (PL) spectra, it can be concl
uded that the PL phenomenon of macroporous silicon should be due to the qua
ntum confinement in these nanoparticles distribution on the pore wall.