Room temperature operation in the wavelength range of 401 to 415 nm has bee
n successfully realized in InGaN/GaN/AlGaN vertical cavity surface emitting
lasers (VCSELs) under photoexcitation. The VCSELs are grown by metal-organ
ic vapor phase deposition and composed of a 2 lambda vertical cavity includ
ing twelvefold stacked multiple InGaN insertions in a GaN matrix grown on t
op of a quarter-wave strain-compensated Al0.15Ga0.85N/GaN distributed Bragg
reflector.