Hydrogen in Be-doped GaInAsP lattice matched to InP: diffusion and interactions with dopants

GaxIn1-xAsyP1-y has been exposed to hydrogen and deuterium plasma. The deut erium diffusion has been measured by secondary ion mass spectroscopy. The p rofiles show that two different species or two different mechanisms are inv olved in the diffusion. They also reveal that deuterium (or hydrogen) inter acts strongly with the Be accepters. This is confirmed by electronic transp ort measurements which demonstrate the passivation of the electrical activi ty of Be by hydrogen which leads, for intermediate doping levels, to sample s turning to n-type after hydrogenation. Finally, the effects of hydrogen o n the photoluminescence spectra are also presented and discussed.