The characteristic features of the formation kinetics of In2S3 layers on in
dium arsenide substrates by heterovalent substitution are studied. The acti
vation energies of two steps in this process are separated and determined.
The variation of the position of the Fermi level on an InAs surface during
treatment in sulfur vapor is recorded by measuring the thermodynamic work f
unction using the Kelvin probe method. (C) 1999 American Institute of Physi
cs. [S1063-7826(99)01012-1].