Factory-wide run-to-run process control

Authors
Yelverton, M Tsakalis, K Stoddard, K
Citation
M. Yelverton et al., Factory-wide run-to-run process control, SOL ST TECH, 42(12), 1999, pp. 45
Citations number
11
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
SOLID STATE TECHNOLOGY
ISSN journal
0038111X → ACNP
Volume
42
Issue
12
Year of publication
1999
Database
ISI
SICI code
0038-111X(199912)42:12<45:FRPC>2.0.ZU;2-Q