Low-defect target metallurgy development for sub-0.18 mu m Al-based interconnects

Authors
Abburi, M Pavate, V Narasimhan, M Ramaswami, S Kardokus, J Buehler, J Yap, L
Citation
M. Abburi et al., Low-defect target metallurgy development for sub-0.18 mu m Al-based interconnects, SOL ST TECH, 42(12), 1999, pp. 55
Citations number
2
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
SOLID STATE TECHNOLOGY
ISSN journal
0038111X → ACNP
Volume
42
Issue
12
Year of publication
1999
Database
ISI
SICI code
0038-111X(199912)42:12<55:LTMDFS>2.0.ZU;2-N