Heteroepitaxial growth of complex-oxide films from a self-organized systemformed in a gas-discharge plasma

New experimental data on the characteristic features of the synthesis and c rystallization of films of solid solutions of lead zirconate-titanate, depo sited by means of rf diode sputtering of ceramic targets, are presented. Su ch a deposition system possesses threshold states, transition through which leads to a qualitative change in the processes occurring in the system and to the appearance of self-organization effects. The basic feature of this change is determined by the appearance of a new structured system, consisti ng of the sputtered particles and particles formed in the plasma, in the pl asma of an rf discharge. (C) 1999 American Institute of Physics. [S1063-784 2(99)01712-2].