Anodic current transients of potentiostatic oxide growth and impedance
spectra of thin oxide films on Al show two independent processes: (i)
dielectric relaxation, resulting in a frequency dependent dielectric
permittivity, with a small activation energy of W=0.1 eV and (ii) an e
mission of mobile ions from the interfaces ( W=1.5 eV) as an initial s
tep of high field oxide growth.