Direct current and pulsed operation of contaminated liquid metal ion sources

Authors
Olson, RT Panitz, JA
Citation
Rt. Olson et Ja. Panitz, Direct current and pulsed operation of contaminated liquid metal ion sources, J VAC SCI B, 17(6), 1999, pp. 2483-2487
Citations number
6
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
17
Issue
6
Year of publication
1999
Pages
2483 - 2487
Database
ISI
SICI code
1071-1023(199911/12)17:6<2483:DCAPOO>2.0.ZU;2-V
Abstract
Gallium liquid metal ion sources (LMISs) have been exposed to common gas an d liquid phase laboratory and vacuum system contaminants. Minor changes in the direct current and pulsed operation of the LMISs were observed after co ntaminant exposure. Time-of-flight mass analysis of the ion emission reveal ed that contaminant species are primarily field evaporated with the gallium substrate. Low vapor pressure contaminants have been observed to constitut e a significant portion of the total emitted ion current. (C) 1999 American Vacuum Society. [S0734-211X(99)03206-0].