Destructive abatement of CF4 and C2F6 via a plasma induced reaction with CaO

The plasma induced reactions of CF4 and C2F6 with CaO powder were examined in an effort to develop new methodologies for perfluorocarbon abatement. Th e reaction of CaO with CF4 (10 sccm flow), activated by an inductively coup led plasma (500 W and 100 mTorr) resulted in the destruction of >70% of the CF4. Under the sane conditions >80% of C2F6 was destroyed. For both reacti ons, the major solid product is polycrystalline CaF2, an environmentally be nign mineral with commercial value. The major gaseous products are CO and C O2. These reaction products are attractive alternatives to fluorine-contain ing byproducts such as F-2(g), COF2(g), and HF(aq) generated by traditional perfluorocarbon abatement techniques. (C) 1999 American Vacuum Society. [S 0734-211X(99)15006-6].