Fabrication of submicrometer regular arrays of pillars and helices

Authors
Malac, M Egerton, RF Brett, MJ Dick, B
Citation
M. Malac et al., Fabrication of submicrometer regular arrays of pillars and helices, J VAC SCI B, 17(6), 1999, pp. 2671-2674
Citations number
13
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
17
Issue
6
Year of publication
1999
Pages
2671 - 2674
Database
ISI
SICI code
1071-1023(199911/12)17:6<2671:FOSRAO>2.0.ZU;2-N
Abstract
We use a glancing-angle deposition technique to produce regular lattices of submicrometer pillars and helices with a two-dimensional lattice constant below 1 mu m and structure heights of 0.5-10 mu m. Possible applications of such structures include photonic crystals and magnetic-storage media. (C) 1999 American Vacuum Society. [S0734-211X(99)15806-2].