Fabrication of patterned media for high density magnetic storage

Arrays of discrete, lithographically patterned magnetic elements have been proposed as a new generation of ultrahigh density patterned magnetic storag e media. Interferometric lithography has been used to make prototype arrays over large areas with periods of 100-200 nm. Arrays of magnetic pillars, p yramids, and dots have been made by electrodeposition, evaporation and lift off, and etching processes, and the magnetic properties of the particles an d their mutual interactions have been measured. (C) 1999 American Vacuum So ciety. [S0734-211X(99)11906-1].