M. Farhoud et al., Fabrication of 200 nm period nanomagnet arrays using interference lithography and a negative resist, J VAC SCI B, 17(6), 1999, pp. 3182-3185
Magnetic information storage density has increased at the rate of 60% per y
ear for the past seven years. There is wide agreement that continuation of
this trend beyond the physical limits of the continuous thin-film media cur
rently used will likely require a transition to discrete, lithographically
defined magnetic pillars, Interference lithography (IL) appears to be the m
ost cost-effective means of producing two-dimensional arrays of such pillar
s. IL can rapidly expose large areas with relatively simple equipment, with
out the need for a mask, and with fine control of the ratio of pillar diame
ter to period. We show that negative-tone imaging yields three times the co
ntrast of positive-tone imaging for the generation of holes in photoresist,
suitable for subsequent deposition or electroplating of magnetic material.
We use a negative i-line, chemically-amplified resist (OHKA THMR-iN PS1) t
o form 200 nm period arrays of magnetic dots in Co and Ni. Such arrays, wit
h a variety of well controlled diameters, are used to study the effect of p
article size on magnetic behavior. (C) 1999 American Vacuum Society [S0734-
211X(99)06806-7].