Vertical cavity surface emitting lasers incorporating structured mirrors patterned by electron-beam lithography

We demonstrate the operation of bottom-emitting vertical cavity surface-emi tting lasers (VCSELs) with linear mode polarization which is controlled in an arbitrary orientation by the use of patterned metallic mirrors on top of the VCSEL surface. The top mirror is made in the shape of a 200 nm pitch g rating, composed of alternating high reflectivity (Au) and low reflectivity (Cr) metal lines, whose orientation determines the polarization of the las er made. The gratings were fabricated by high-resolution (<50 nm) electron- beam lithography and lift-off technique, and were aligned with the other pa rts of the VCSEL structure (top electrode, ion-implanted zone) fabricated b y conventional photolithography. Various types of mirror shapes and sizes w ere fabricated, including square and circular grating envelopes, as well as circular mirrors with an average (radial) Gaussian reflectivity. (C) 1999 American Vacuum Society. [S0734-211X(99)06506-3].