Si SET devices are discussed from the viewpoint of suitability for CMOS tec
hnology. Since there are limitations in the application of devices with a l
ow driving performance and no gain in the conventional circuit scheme, it i
s a challenge to implement their advantages into a chip for better performa
nce as a total system. We propose a quantum function-embedded CMOS structur
e that should be open for the implementation of new devices. A key point is
a graceful assimilation, since a sudden change in the architecture is not
a solution at present. Although Si device/process technology will certainly
be developed further, continuing investigation of the SET technology is ne
cessary, if the CMOS technology is to extend into the 21st century, down to
the sub-50 nm level. (C) 1999 Elsevier Science B.V. All rights reserved.