Front- and back-channel drain-conductance characteristics of SOI-MOSFETs ar
e calculated by performing a Monte Carlo simulation, and the calculated res
ults are compared with the experimental results of Perron et al. (Proceedin
gs of the ESSDERC '98, 1998, p. 284) in order to extract the roughness para
meters of the two interfaces. Effect of image charge in oxide layers in SOI
structures is also discussed. (C) 1999 Elsevier Science B.V. All rights re
served.