E. Herrero et al., Influence of the deposition parameters on La-A-Mn-O (A = Ca, Sr) films grown by low-pressure aerosol pyrolysis, CHEM MATER, 11(12), 1999, pp. 3521-3527
Thin films of composition La(1-x)A(x)MnO(3) (A = Ca, Sr) were deposited by
a modified CVD process. This method uses pyrolysis of an aerosol obtained b
y high-frequency spraying of a solution containing the corresponding 2,2,6,
6-tetramethylheptane-3,5-dione complexes solved in diethylene glycol dimet
hyl ether. The growth was carried out at different temperatures in an oxyge
n/argon atmosphere at a constant pressure of 10 Torr. The influence of the
deposition parameters on the growth of ferromagnetic films, either without
any preferential orientation or highly [100] oriented, is analyzed.