Synthesis and photoimaging study of a new poly(methacrylate) with tetheredsilacyclobutane moiety

A new methacrylate with a tethered silacyclobutane moiety, 6-(methylcyclotr imethylene-silyl)hexyl methacrylate, has been synthesized. Radical polymeri zation (thermal) yielded a linear poly(methacrylate) without affecting the silicon-containing four-membered ring. Photoactivated ring-opening polymeri zation of the silacyclobutane functionality was employed to cross-link the polymer thin film, yielding, after development, a negative photoimage. Evid ence of solid-state ring-opening polymerization was provided by infrared sp ectroscopy. Postbaking was found to be important. With 0.1% molar Pt(acac)( 2) with respect to monomer, the system exhibited D-c of 900 mJ/cm(2).