Processing scheme creates silicon voids as an alternative to SOI

Authors
Bursky, D
Citation
D. Bursky, Processing scheme creates silicon voids as an alternative to SOI, ELECTR DES, 47(26), 1999, pp. 34-34
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
ELECTRONIC DESIGN
ISSN journal
00134872 → ACNP
Volume
47
Issue
26
Year of publication
1999
Pages
34 - 34
Database
ISI
SICI code
0013-4872(199912)47:26<34:PSCSVA>2.0.ZU;2-S