A study of the degradation of drain current under bias and temperature stre
ss is presented for InP-based InAlAs/InGaAs HEMTs. Nonlinear drain resistan
ce has been found to play an important role in the degradation. The decreas
e in the drain current is caused by the rapid increase in the drain resista
nce. The result suggests that the carrier density, which is originally suff
icient to keep the resistance low and linear, decreases in the drain ohmic
region.