SiGe micro-cooler

Authors
Zeng, GH Shakouri, A La Bounty, C Robinson, G Croke, E Abraham, P Fan, XF Reese, H Bowers, JE
Citation
Gh. Zeng et al., SiGe micro-cooler, ELECTR LETT, 35(24), 1999, pp. 2146-2147
Citations number
6
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
ELECTRONICS LETTERS
ISSN journal
00135194 → ACNP
Volume
35
Issue
24
Year of publication
1999
Pages
2146 - 2147
Database
ISI
SICI code
0013-5194(19991125)35:24<2146:SM>2.0.ZU;2-X
Abstract
Thin film SiGe heterostructure coolers have been Fabricated and characteris ed. Cooling by as much as 1.1K at room temperature and 1.6K at a substrate temperature of 70 degrees C over a 3 mu m Si/SiGe superlattice barrier has bhn measured. This corresponds to cooling power densities of hundreds of wa tts per square centimetre.