Deep Level Transient Spectroscopy (DLTS) technique has been used to study d
eep levels in palladium doped n-type silicon. The deep level due to Pd in n
-type Si has been observed at Ec-0.22 eV with the carrier capture cross-sec
tion of 31E-16 cm(2). The results are in agreement with the previous result
s in Pd-doped samples. Also C-V and I-V studies have been carried out in th
e Au/n-Si: Pd Schottky diodes.