Experimental determination of energy resolution and transmission characteristics of an electrostatic toroidal spectrometer adapted to a standard scanning electron microscope

The main characteristics of sectorial toroidal energy analyzer for a new el ectrostatic electron spectrometer adapted to a standard scanning electron m icroscope are defined and determined experimentally. These transfer charact eristics, i.e. intensity-energy response and transmission functions, energy resolution and coupling constant, are needed for spectrometer calibration, registration and energy correction of measured backscattered electron spec tra and microtomographic analysis of multilayered structures. The spectrome ter response to a monoenergetic primary electron beam and to a continuous e nergy distribution is discussed. Detector response functions for energy ind ependent and linear energy dependent detectors are considered. For aperture slits of the spectrometer which allow reasonable electron intensities at t he detector an energy resolution of about 2.5% is obtained. (C) 1999 Elsevi er Science B.V. All rights reserved.