EFFECT OF TIP SHAPE ON SURFACE-ROUGHNESS MEASUREMENTS FROM ATOMIC-FORCE MICROSCOPY IMAGES OF THIN-FILMS

Authors
WESTRA KL THOMSON DJ
Citation
Kl. Westra et Dj. Thomson, EFFECT OF TIP SHAPE ON SURFACE-ROUGHNESS MEASUREMENTS FROM ATOMIC-FORCE MICROSCOPY IMAGES OF THIN-FILMS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(2), 1995, pp. 344-349
Citations number
19
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
13
Issue
2
Year of publication
1995
Pages
344 - 349
Database
ISI
SICI code
1071-1023(1995)13:2<344:EOTSOS>2.0.ZU;2-Q