Microstructure and composition of Au/Si3N4 model interface

Authors
Suzuki, H Yonemitsu, K Saito, T Ikuhara, Y
Citation
H. Suzuki et al., Microstructure and composition of Au/Si3N4 model interface, J CERAM S J, 107(12), 1999, pp. 1193-1195
Citations number
3
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF THE CERAMIC SOCIETY OF JAPAN
ISSN journal
09145400 → ACNP
Volume
107
Issue
12
Year of publication
1999
Pages
1193 - 1195
Database
ISI
SICI code
0914-5400(199912)107:12<1193:MACOAM>2.0.ZU;2-E
Abstract
An Au/Si3N4 interface was obtained by vapor deposition of Au on a Si3N4 sub strate in vacuum, both at room temperature and 600 degrees C. The interface structure and chemical composition were investigated by high resolution an d analytical electron microscopy. A damaged phase was observed between Au a nd Si3N4 crystals. The thickness of this phase increased when the substrate surface was polished or the substrate was heated. This phase was found to be amorphous and merely composed of Si and N.