The modeling of relationship between surface roughness and electrostatic force on electrostatic chuck

Citation
Kj. Jeong et al., The modeling of relationship between surface roughness and electrostatic force on electrostatic chuck, J KOR PHYS, 35, 1999, pp. S701-S707
Citations number
9
Categorie Soggetti
Physics
Journal title
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
ISSN journal
03744884 → ACNP
Volume
35
Year of publication
1999
Supplement
S
Pages
S701 - S707
Database
ISI
SICI code
0374-4884(199912)35:<S701:TMORBS>2.0.ZU;2-X
Abstract
Surface roughness control is very important in obtaining uniform and strong electrostatic force (Johnsen-Rahbeck force) on electrostatic chucks. In th is study, modeling has been tried to find the relationships among the Johns en-Rahbeck force, response time and dissipated power for the change of surf ace roughness on electrostatic chucks.