Kj. Jeong et al., The modeling of relationship between surface roughness and electrostatic force on electrostatic chuck, J KOR PHYS, 35, 1999, pp. S701-S707
Surface roughness control is very important in obtaining uniform and strong
electrostatic force (Johnsen-Rahbeck force) on electrostatic chucks. In th
is study, modeling has been tried to find the relationships among the Johns
en-Rahbeck force, response time and dissipated power for the change of surf
ace roughness on electrostatic chucks.