3-D helical THz antennas

This paper presents a novel method of fabricating helical antennas, singula r and arrayed, for the low-terahertz (0.1-2.7 THz) frequency range. The THz antenna structures are fabricated by using laser chemical vapor deposition (LCVD) to form fibers that can be grown into complex three-dimensional str uctures directly on semiconductor substrates. By focusing the laser through a diffractive optic, arrays of antennas can be fabricated at the same time . THz radiation detection devices can be realized by combining the LCVD ant ennas with MEMS microbolometers that convert received THz radiation into a change in resistance. Arrays of these antenna-bolometer pairs can be fabric ated on the same substrate to realize a THz imaging device. (C) 2000 John W iley & Sons, Inc.