Transport properties of proton-irradiated, GaAs/AlGaAs two-dimensional elec
tron gas structures are investigated. The resistance, the carrier concentra
tion and the quantum life time are strongly influenced by the proton irradi
ation. For low proton doses, < 5 x 10(11) p(+)/cm(2), the carrier concentra
tion is not influenced, while the resistance increases and the quantum life
time decreases. For higher doses, the carrier concentration also decreases
, and for doses > 5 x 10(12) p(+)/cm(2) the samples become insulating. It i
s also found that the transport properties are recovered after the samples
are annealed at 500 degrees C for 2 min. (C) 2000 Elsevier Science B.V. All
rights reserved.