The defect formation during plastic deformation of GaAs has been investigat
ed by means of the analysis of stress-strain curves including relaxation ex
periments and positron lifetime spectroscopy. The deformation creates a mix
ture of dislocations and point defects, which contribute to the positron li
fetime spectra. Vacancy clusters can already be formed at rather low deform
ation temperatures via jog dragging. The concentration of generated defects
depends on the number of activated slip systems for single-slip or multipl
e-slip orientation of the deformation axis. (C) 1999 Elsevier Science B.V.
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