He++ irradiation induced defects in Be-doped Al-0.5 Ga-0.5 As MBE layers ha
ve bean studied using the DLTS method. The samples were irradiated by He+ions of an energy equal to 0.5 MeV and fluence of 10(12) cm(-2). In irradia
ted samples, persistent photocapacitance was observed after illumination of
the samples at the liquid nitrogen ambient. Defect (or defects) introduced
during irradiation can be responsible for the observed persistent photocap
acitance effect. (C) 1999 Elsevier Science B.V. All rights reserved.