FORMATION OF ALUMINA FINE PARTICLES BY A MAGNETRON SPUTTERING-GAS AGGREGATION METHOD

Authors
GOTO M MURAKAMI J TAI Y YOSHIMURA K IGARASHI K TANEMURA S
Citation
M. Goto et al., FORMATION OF ALUMINA FINE PARTICLES BY A MAGNETRON SPUTTERING-GAS AGGREGATION METHOD, Zeitschrift fur Physik. D, Atoms, molecules and clusters, 40(1-4), 1997, pp. 115-118
Citations number
7
Categorie Soggetti
Physics, Atomic, Molecular & Chemical
Journal title
Zeitschrift fur Physik. D, Atoms, molecules and clusters → ACNP
ISSN journal
01787683
Volume
40
Issue
1-4
Year of publication
1997
Pages
115 - 118
Database
ISI
SICI code
0178-7683(1997)40:1-4<115:FOAFPB>2.0.ZU;2-T
Abstract
The alumina particles have been generated by a magnetron sputtering - gas aggregation method. The analyses of transmission electron microsco pe (TEM) images and electron diffraction patterns revealed some of the particles are tiny crystals of theta-alumina. The dependence of the p article size on the geometry and the temperature of the source exit ha s been studied.