Nanometer-sized clusters of copper have been produced in a hollow cath
ode sputtering source and deposited on SiOx. Halo-like structures cons
isting of micrometer sized protrusions in the silicon oxide surface su
rrounded by thin rings of smaller particles are observed. The area in
between seems to be depleted of particles. We propose that the halo-li
ke structures are a result of electrostatic forces acting between the
incoming charged clusters and charged regions on the surface. A simple
computer simulation supports this suggestion.