Longitudinal light profile microscopy: A new method for seeing below the surfaces of thin-film materials

Authors
Citation
Jf. Power et Sw. Fu, Longitudinal light profile microscopy: A new method for seeing below the surfaces of thin-film materials, APPL SPECTR, 53(12), 1999, pp. 1507-1519
Citations number
25
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences
Journal title
APPLIED SPECTROSCOPY
ISSN journal
00037028 → ACNP
Volume
53
Issue
12
Year of publication
1999
Pages
1507 - 1519
Database
ISI
SICI code
0003-7028(199912)53:12<1507:LLPMAN>2.0.ZU;2-O
Abstract
Longitudinal light profile microscopy (LLPM) is introduced in this work as a new optical method for depth profiling the properties of thin-him materia ls. The method uses irradiation of an optically polished cross section of a prepared thin film sample, by a laser beam propagating along the depth (lo ngitudinal) axis of the material. An observation microscope, aligned along an orthogonal axis to the sample cross section, transfers an image of the l ight profile propagating along the material's longitudinal (depth) axis to a recording camera. While depth attenuation of the optical beam in the samp le is dominated by light absorption, and turbid scatter (which our analysis neglects), light profile images recovered by the microscope use contrast m echanisms based on luminescence and elastic or inelastic light scatter. Blu r contributions to the images arising from axial thickness of the light pro file "object" are shown to be minimal in our microscope. Our experimental s etup, moreover, is constructed from relatively inexpensive, easily availabl e components. A number of different image contrast mechanisms, including Lu minescence and elastic scattering contrast, were demonstrated on materials with known optical properties, including continuous media and laminates. Th e sample dimensions and depth-dependent image features were directly observ able and unambiguous to identify. images recovered on the basis of elastic scattering showed unusual contrast for optical interfaces in materials whic h were transparent at the analysis wavelength. The method holds promise for providing a plethora of new depth-resolved imaging mechanisms.