A new external ion-beam system was developed and combined with a light ion-
microbeam system in JAERI Takasaki. The system is designed for micro-partic
le-induced X-ray emission analysis of biological samples in air environment
with 1 mu m spatial resolution. One of the most serious problems in keepin
g such a high spatial resolution is multiple scattering in a beam exit wind
ow. Thin Kapton film (7.5 mu m thick) was adopted as the exit window as wel
l as a sample backing foil to minimize the distance between the film and sa
mples. The Lifetime of the foil under ion irradiation and spatial resolutio
n of the external microbeam were investigated. The results shows that the f
ilm can endure sufficient long-time irradiation to take elemental maps and
the resolution can be kept nearly 1 mu m.